| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron microscope which has a relatively large use range of acceleration voltage without increasing sample damage and contamination. <P>SOLUTION: An electron microscope comprises: an electron beam optical system that irradiates a sample with an electron beam from an electron gun; and an electron detector that detects an electron from the sample. The electron detector includes a ceramic scintillator and a photoelectric conversion element that converts light from the ceramic scintillator into current. The ceramic scintillator includes a ceramic fluorescence substance that is formed by sinter a fluorescence substance, and the thickness of the ceramic fluorescence substance is 200 to 300 μm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
