| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser scribe device structured to easily cope with the variation of a processing unit and a carrying mechanism. <P>SOLUTION: The laser scribe device is composed of a processing unit A and a laser unit B, the processing unit A is surrounded by a processing unit frame 1 composed to constitute the appearance of a rectangular parallelepiped, and the laser unit B is surrounded by a laser unit frame 22 composed to constitute the appearance of the rectangular parallelepiped having a bottom surface shape which is the same shape as the upper surface of the processing unit frame 1. The processing unit A includes a stone surface plate 3, a moving stage 13 and a table 15 supported by an inner side space surrounded by the processing unit frame 1, the laser unit B includes a laser beam source 16 and a laser beam irradiation part 17 supported by the laser unit frame 22, and the laser unit frame 22 and the processing unit frame 1 are detachably united. <P>COPYRIGHT: (C)2013,JPO&INPIT |
