发明名称 METHOD OF FABRICATING SEMICONDUCTOR SUBSTARTE AND METHOD OF FABRICATING LIGHE EMITTING DEVICE
摘要 PURPOSE: A semiconductor substrate manufacturing method and a light emitting device manufacturing method are provided to easily remove the substrate by growing the hollow by forming the hollow between the growth substrate and the semiconductor layer. CONSTITUTION: A first semiconductor layer(102) is formed on a substrate(101). A metallic material layer(103) is formed on the first semiconductor layer into the pattern layout. A second semiconductor layer(104) is formed on the first semiconductor layer and the metallic material layer. A hollow(102a) is formed on a portion of first semiconductor layer being lower than the metallic material layer.
申请公布号 KR101229832(B1) 申请公布日期 2013.02.04
申请号 KR20090079436 申请日期 2009.08.26
申请人 发明人
分类号 H01L21/20;H01L33/02 主分类号 H01L21/20
代理机构 代理人
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