| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a motor that prevents gas leakage even in a vacuum environment. <P>SOLUTION: A partition member 15 is arranged between a magnetic member 22 of a rotor 12 and a stator 13. A first partition member 16 has a plate-like portion 16a, and a seal support portion 16b that is formed integrally with an end of the plate-like portion 16a. The plate-like portion 16a is arranged so as to extend along an axial direction of a shaft 21 and cover an exposed surface of the stator 13 on a side of the rotor 12. The seal support portion 16b is formed so as to be larger in thickness than the plate-like portion 16a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
