发明名称 MANUFACTURING METHOD OF P-TYPE DIFFUSION LAYER AND MANUFACTURING METHOD OF SOLAR CELL ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a p-type diffusion layer and a manufacturing method of a solar cell element which are capable of forming a p-type diffusion layer in a specific part and in which characteristic deterioration caused by remaining organic substances is small. <P>SOLUTION: When a p-type diffusion layer is formed using a p-type diffusion layer formation composition containing a glass powder including an acceptor element and a dispersion medium including an organic substance, organic components included in the dispersion medium are sufficiently removed before thermal diffusion treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013026579(A) 申请公布日期 2013.02.04
申请号 JP20110162642 申请日期 2011.07.25
申请人 HITACHI CHEM CO LTD 发明人 SATO TETSUYA;YOSHIDA MASATO;NOJIRI TAKESHI;MACHII YOICHI;IWAMURO MITSUNORI;ODA AKIHIRO;ADACHI SHUICHIRO
分类号 H01L21/225;H01L21/316;H01L31/04 主分类号 H01L21/225
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