| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique that dispenses with the adjustment of a length measurement axis of a measuring device, and that has an advantage in easy attachment and prevention of the optical element from pollution. <P>SOLUTION: A measuring device that measures the distance between a reference surface and a surface to be inspected comprises: a beam splitting element that splits a light beam from a light source; a housing that houses the reference surface, the surface to be inspected, and the beam splitting element therein, and that fixes the reference surface and the beam splitting element therein; a first display part that is disposed outside the housing, and that displays a length measurement base point indicating the position of the surface to be inspected at the time when a first optical path from the beam splitting element to the reference surface is equal to a second optical path from the beam splitting element to the surface to be inspected; a second display part that is disposed outside the housing, and that displays a length measurement axis indicating an axis parallel to an optical path of the second light; and a processing part that calculates the distance between the reference surface and the surface to be inspected from an interference signal obtained from the interference between reflected light beams from the reference surface and the surface to be inspected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
