| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device that can restrain blackening of an arc tube. <P>SOLUTION: The light source device 100 includes: a discharge lamp 10 having the arc tube 12 having a discharge space 14 where a discharge medium is enclosed, a first electrode 16, and a second electrode 18; a discharge lamp drive part 20 for supplying AC current to the first electrode 16 and the second electrode 18 and driving the discharge lamp 10; an ultrasonic wave generation part 30 for irradiating ultrasonic waves W to the discharge space 14; an impedance acquisition part 40 for acquiring impedance between the first electrode 16 and the second electrode 18; and a control part 50 for controlling the ultrasonic wave generation part 30 on the basis of the impedance. Frequency of the ultrasonic waves W becomes a frequency for oscillating at least one of an electrode material of a first electrode 16 and a second electrode 18, an oxide of the electrode material, and the discharge medium. <P>COPYRIGHT: (C)2013,JPO&INPIT |
