DEVICE FOR DETECTING DEFLECTION AMOUNT OF LASER LIGHT, DEVICE FOR MEASURING DISPLACEMENT, METHOD OF MANUFACTURING OPTICAL ELEMENT MOLDING DIE AND OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To highly accurately measure optical axis deflection in two directions orthogonal to an optical axis of laser light.

SOLUTION: A first polarization beam splitter 4 splits the laser light 2a emitted from a laser light source 1 into a first linearly polarized component 2b and a second linearly polarized component 2c. An optical system 3 makes at least one of the first linearly polarized component 2b and the second linearly polarized component 2c rotate around the optical axis such that a deflecting direction of the first linearly polarized component 2b and a deflecting direction of the second linearly polarized component 2c are orthogonal to each other to create synthetic light. A light shielding member 8 shields part of the synthetic light by projecting a leading end 8a toward the synthetic light. A second polarization beam splitter 9 splits passing light passing without being shielded by the light shielding member 8 into the first linearly polarized component 2b and the second linearly polarized component 2c. Respective light receiving elements 10a, 10b measure light amounts of the respective linearly polarized components split by the polarization beam splitter 9. An arithmetic operation unit 12 obtains a deflection amount of the laser light based on a result of measurement.

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