| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint device advantageous in a standpoint of throughput. <P>SOLUTION: The imprint device includes: a substrate holding section 1 for holding a substrate 2; a mold holding section 7 for holding a mold 5; a separating section SP which includes a plate member 3 that surrounds a side of a projection 51 and is arranged to face a peripheral section 52 and separates a space between the substrate holding section and the peripheral section of the mold into a first space 21 on a side of the substrate holding section and a second space 22 on a side of the mold holding section; and a gas supply section 6. The plate member has an opening and a gap G is formed between the side of the projection of the mold and an inner face of the opening. The gas supply section supplies gas for promoting inflow of resin R to a recess of a pattern to the first space from the second space via the gap and supplies the gas to the second space so that the gas is supplied to a space between the projection and the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
