发明名称 FRAME SUPPLY APPARATUS AND FRAME SUPPLY METHOD
摘要 <P>PROBLEM TO BE SOLVED: To solve the problem that the recent trend toward, in particular, larger frame size and thinner frame has caused a problem of frame warp, specifically, a largely warped frame has a high probability of failure in taking the frame, and in the case of the failure in taking the frame, namely, if failed to take the frame, a mounting throughput becomes longer and it is necessary for an operator to manually remove the frame not taken, thereby increasing the number of operations. <P>SOLUTION: Before a loader feeder part takes a frame from a frame magazine part, a loader lift part is moved in a Y direction. Thereafter, the loader feeder part takes the frame from the frame magazine part. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013026270(A) 申请公布日期 2013.02.04
申请号 JP20110156680 申请日期 2011.07.15
申请人 HITACHI HIGH-TECH INSTRUMENTS CO LTD 发明人 OKUBO TATSUYUKI
分类号 H01L21/677;H01L21/50 主分类号 H01L21/677
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