| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently measure the inner diameter and outer diameter of an object without inserting a sensor, etc. to the object. <P>SOLUTION: The scanning beams of a two-dimensional laser displacement meter 3 arranged outside an object 2 are positioned at an inner peripheral surface 21 of the object 2 placed on a rotary table 1 and a calibration surface 4a which is arranged outside the object 2 and whose distance from a rotation axis 13 of the rotary table 1 is known. Then, a displacement difference between the inner peripheral surface 21 and the calibration surface 4a is measured by the two-dimensional laser displacement meter 3, and the radius of the inner peripheral surface 21 is calculated based on the distance and the displacement difference. The two-dimensional laser displacement meter 3 is arranged to allow the rotation axis 13 of the rotary table 1 to be positioned on a surface including the laser emission point of the two-dimensional laser displacement meter 3 and the scanning beams. The rotary table 1 is rotated, and the respective radii of the inner peripheral surface 21 and another inner peripheral surface symmetrically positioned in a diameter direction are calculated. The values of the radii are added thereby to calculate the diameter of the object 2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
