DEVICE AND METHOD FOR MEASURING THICKNESS OF THIN FILM

摘要

PURPOSE: A device for measuring the thickness of a thin film is provided to simply install an aperture stop without a major structure change by installing the aperture stop in an object lens or a nosepiece, or an adaptor for connecting the object lens and the nosepiece. CONSTITUTION: A device for measuring the thickness of a thin film(F) comprises a light source(110), an optical system(130), an aperture stop(210), a first detecting unit(140), and a second detecting unit(150). The optical system collects the lights penetrated through the diaphragm in the thin film and includes an object lens(134) guiding the lights reflected by the thin film. The first detecting unit measures the thickness of the film by using the lights guided from the optical system. The second detecting unit detects the image information of the thin film by using the lights guided from the optical system.