| 摘要 |
<P>PROBLEM TO BE SOLVED: To sufficiently extend all division lines when the number of division lines constituting a wafer differs in a vertical direction and a lateral direction and when extension of partial division lines becomes insufficient. <P>SOLUTION: A wafer extension device 1 for extending the wafer W held by a frame F via an adhesive tape T in a face direction includes: frame holding means 2 for holding the frame F; and push-up means 30a to 30d for extending the adhesive tape T. The push-up means 30a to 30d are arranged in a ring shape divided into at least four, and they include push-up amount control means 32a to 32d for individually controlling heights of the respective push-up means. Since push-up height can be varied, a tape extension amount in a desired direction is adjusted and thus the extension amount of the wafer W is controlled at every direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
