MANUFACTURING METHOD FOR OPTICAL ELEMENT, AND OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for an optical element that is formed on a common substrate and includes multiple mesa-structure waveguides.

SOLUTION: A manufacturing method for an optical element includes steps of: forming a first semiconductor lamination part and a second semiconductor lamination part; forming a first formative mask and a first protective mask; etching a semiconductor layer where the first formative mask and the first protective mask are not formed, applying crystal growth processing to a third semiconductor lamination part and forming an embedded-mesa-structure waveguide; applying crystal growth processing to a fourth semiconductor lamination part; forming a second protective mask, and a second formative mask with width smaller than the first protective mask; and etching a semiconductor layer where the second protective mask and the second formative mask are not formed and forming a high-mesa-structure waveguide.

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