STAGE DEVICE AND PROCESS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of controlling a thickness distribution of a function material layer with high precision and in a short period of time.

SOLUTION: A stage device according to an embodiment comprises: a height control unit 12 arranged on a lower surface side of a substrate 13 to be processed and including a plurality of height control elements which are vertically driven; and a control unit 15 which controls the height control unit 12. The control unit 15 divides an upper surface of the substrate 13 to be processed into a plurality of areas, and sets a height of each of the areas independently by controlling a height of each of a plurality of height control elements on the basis of a data value.

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