| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the displacement of an object to be measured with a simple structure using electrostatic capacitance. <P>SOLUTION: The present invention provides a plane stage having a moving stage that moves relatively in a plane with respect to a fixed section. The plane stage comprises a first sensor that is a position sensor for measuring the position of the moving stage. The first sensor has a fixed electrode section having a first pair of fixed opposite electrodes and a second pair of fixed opposite electrodes that face each other at predetermined intervals and a movable electrode section having first movable electrodes 222 partially inserted between the first pair of fixed opposite electrodes and second movable electrodes 221 partially inserted between the second pair of fixed opposite electrodes. The first pair of fixed opposite electrodes has a first electrostatic capacitance varying depending on an insertion state of the first movable electrodes 222, and the second pair of fixed opposite electrodes has a second electrostatic capacitance varying depending on an insertion state of the second movable electrodes 221. <P>COPYRIGHT: (C)2013,JPO&INPIT |
