| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable acceleration sensor whose sensitivity varies depending on acceleration applied thereto. <P>SOLUTION: Movable electrodes 6 are connected to a mass portion 5 at one end. The mass portion 5 and movable electrodes 6 are displaceable with respect to a silicon substrate 1 in response to acceleration. Fixed electrodes 7a, 8a are positioned to face the sides of the movable electrodes 6 and are fixed to the silicon substrate 1. For each set of movable and fixed electrodes, a capacitance-voltage conversion circuit 12 converts changes in capacitance C11 between the movable electrode 6 and the fixed electrode 7a, and changes in capacitance C12 between the movable electrode 6 and the fixed electrode 8a into electrical signals. The fixed electrode 7a is positioned closer to the movable electrode 6 than the fixed electrode 8a, and works as a stopper for limiting the displacement of the movable electrode 6. The distance between the fixed electrode 7a and the mass portion 5 differs from the distance between the fixed electrode 8a and the mass portion 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
