| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron microscope system and a control method thereof, which allow a clear image of a sample to be taken. <P>SOLUTION: The electron microscope system comprises: an electron gun for generating an electron beam; an optical system for irradiating a sample with the electron beam; a stage to set the sample thereon; an image-taking mechanism for taking an image of the sample on irradiation on the sample with the electron beam for observation of the sample; an analyzing mechanism for analyzing the sample image taken by the image-taking mechanism; and a position-control mechanism for controlling the sample and the image-taking mechanism in the relative position. The position-control mechanism moves at least one of the stage and the field of view of the image-taking mechanism on the basis of the result of the analysis by the analyzing mechanism. <P>COPYRIGHT: (C)2013,JPO&INPIT |
