| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain more accurate spectral data in shorter time. <P>SOLUTION: An imaging section 108 images an image according to light made incident on from a sample 101. A color sensor 110 captures spectral data of light made incident from the sample 101. A light source control part 105 turns on a light source 104 in a sampling period at regular times and turns off the light source 104 in a sampling period at dark times. Based on spectral data obtained by the color sensor 110 in the sampling period at the regular times and spectral data obtained by the color sensor 110 in the sampling period at the dark times, a correcting part 111 corrects the color of an image imaged by the imaging part 108. A stage control part 103 moves the relative position of a stage 102, objective lens 106, and half mirror 107 in the sampling period at the dark times. <P>COPYRIGHT: (C)2013,JPO&INPIT |
