| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the displacement of an object to be measured with a simple structure using electrostatic capacitance. <P>SOLUTION: The present invention provides a position sensor 100 for measuring the position of a moving stage. The position sensor 100 comprises: first movable electrodes 131 partially inserted between a first pair of fixed opposite electrodes 111 and 121; second movable electrodes 132 partially inserted between a second pair of fixed opposite electrodes 112 and 122; and third movable electrodes 133 partially inserted between a third pair of fixed opposite electrodes 113 and 123. The first opposite electrodes are disposed in a position shifted in a first direction with respect to the second opposite electrodes, and the third opposite electrodes are disposed in a position shifted in a second direction with respect to the first opposite electrodes. <P>COPYRIGHT: (C)2013,JPO&INPIT |
