| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten time for leak testing. <P>SOLUTION: A change of differential pressure between pressures inside a master vessel and a work vessel is measured, as a temperature correction value, in a state of blocking the master vessel and the work vessel by use of air pressure. Then, the change of the differential pressure is measured, as a test differential-pressure value, in a state of blocking the master vessel and the work vessel by use of test pressure, and the test differential-pressure value is corrected based on the temperature correction value to determine whether a leak exists or not in the work vessel. With respect to each subsequent work vessel, the change of the test differential-pressure is measured, the test differential-pressure value is corrected based on the temperature correction value, and the step is repeated of determining whether the leak exists or not in the work vessel on the basis of the corrected test differential-pressure value. When the leak is determined to exist in the work vessel, the test differential-pressure value is re-measured with respect to the same work vessel, and the re-measured test differential-pressure value is corrected on the basis of the temperature correction value, and thereafter a re-try step is performed to determine whether the leak exists or not in the work vessel. At this point, when the leak is determined to exist, the method and the apparatus return to the first step of measuring the temperature correction value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
