SWITCH DEVICE, TRANSMISSION CHANNEL SWITCHING DEVICE, AND TEST DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a switch device comprising a long life piezoelectric actuator.

SOLUTION: A switch device comprises: a body having a first contact point; and an actuator for shifting a second contact point to make it in contact with or separate from the first contact point. The actuator comprises: a support layer; a first piezoelectric film formed on a top surface of the support layer; a second piezoelectric film provided on the other surface of the support layer in the opposite side of the first dielectric film and facing to the first dielectric film via the support layer, for changing warpage of the actuator by expanding and contracting in response to a driving voltage; electrode layers for applying respective driving voltage to a top surface of the first piezoelectric film and a bottom surface of the second piezoelectric film; and a second conductive oxide film containing conductive oxide formed between the second dielectric film and the electrode layer on the opposite side of the support layer for the second dielectric film.

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