| 摘要 |
PURPOSE: An exhausting system for a single crystal grower and a single crystal grower including the same are provided to automatically measure the degree of impurity deposition on an exhaust pipe by detecting the temperature of the exhaust pipe. CONSTITUTION: In an exhausting system for a single crystal grower and a single crystal grower including the same, a chamber(110) has a crucible. At least one exhaust pipe discharges impure gas from melt which is accepted into the crucible. At least one temperature sensor measures the temperature of the exhaust pipe. A controller controls the temperature sensor. |
