| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film solar cell in which a plurality of cells are connected in series, capable of preventing a short circuit in a groove, and a method for manufacturing the same. <P>SOLUTION: A method for manufacturing a thin film solar cell, includes: first forming a surface electrode layer 11 on an insulating translucent substrate 10; forming a first groove 31 separating the surface electrode layer 11 for each solar cell; forming a photoelectric conversion layer 12 including a first photoelectric conversion layer 121 and a second photoelectric conversion layer 122 having a thickness of 2 μm or more; then forming a second groove 32 separating the photoelectric conversion layer 12 so as to expose the surface electrode layer 11; forming a rear surface electrode layer 13 on the photoelectric conversion layer 12 having the second groove 32 formed therein; and forming a third groove 33 separating the photoelectric conversion layer 12 from the rear surface electrode layer 13 between the adjacent solar cells. The step of forming the third groove 33 includes processing the photoelectric conversion layer 12 and the rear surface electrode layer 13 so that a bottom width of the third groove 33 is 30 μm or more and 40 μm or less, and side walls thereof have a tapered shape having a width increasing toward a side of the rear surface electrode layer 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
