发明名称 CARRIER PLATE FORMED BY BONDING MULTIPLE METAL THIN PLATES AND MANUFACTURING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology of manufacturing a carrier plate for miniaturized chip elements, in which a hole having a size smaller than the overall thickness of a metal plate can be formed, with a simple structure. <P>SOLUTION: When forming a first hole 220 for inserting a chip in a metal thin plate, a carrier plate assembly is manufactured by a system of bonding a large number of metal thin plates having a thickness that is remarkably smaller than the size of a hole to be formed. A diffusion bonding system of applying a high pressure in a high temperature vacuum atmosphere, a diffusion bonding system of adding a bonding catalyst agent softer than the base metal, i.e., the metal thin plate, or a system of bonding with an adhesive for metal bonding is utilized as the bonding system. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013021303(A) 申请公布日期 2013.01.31
申请号 JP20120095489 申请日期 2012.04.19
申请人 HANOL FEI CO LTD 发明人 KIM JI-TE
分类号 H01G13/00;H01L21/673;H01C17/28 主分类号 H01G13/00
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