| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lithographic apparatus having a component that moves in a first direction, the component including a passive gas flow system. <P>SOLUTION: The passive gas flow system has a gas inlet to drive gas into the passive gas flow system when the component moves in the first direction and a gas outlet, connected to the gas inlet by a gas conduit, to direct the gas that is driven into the passive gas flow system in a certain direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
