Imaging optics for use in optical system of projection exposure system, has imaging lights carrying components and mirror for grazing incidence of imaging light, where mirror for touching incident is arranged in image beam path

摘要

The optics (7) has multiple imaging lights (3) carrying components and a mirror for grazing incidence of the imaging light, where the optics is designed as pupil obscure system. The mirror for touching incident is arranged in an image beam path of the imaging optics between two prominent optical components. The mirror for touching incident comprises a free forming reflecting surface. A compensation mirror comprises a multilayer reflectivity coating and varies layer thickness distribution over the reflecting surface of the compensation mirror. Independent claims are also included for the following: (1) a projection exposure system (2) a method for manufacturing a structured component.