MANUFACTURING METHOD OF MULTI-COMPONENT METAL OXIDES THIN FILM HAVING SUPERLATTICE STRUCTURE IN THERMOELECTRIC MODULE

摘要

PURPOSE: A method for manufacturing a multi-component metal oxide thin film with a superlattice structure of a thermoelectric device is provided to reduce manufacturing costs by not requiring a vacuum chamber to form a thin film. CONSTITUTION: A ZnO buffer layer is formed on a substrate by a sputtering method(S1). A thin film is formed by rotating the substrate with a buffer layer using a spin coating method to drop metal source containing solutions on the rotating substrate(S2). The thin film formed with the spin-coating method is dried(S3). A metal oxide thin film with the superlattice structure is formed by thermally processing the dried thin film(S4). [Reference numerals] (S1) Forming a ZnO buffer layer on a substrate by sputtering; (S2) Forming a thin film on a buffer layer with a spin-coating method; (S3) Drying a thin film; (S4) Forming a metal oxide thin film with a superlattice structure by thermally processing a thin film