| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate position adjusting method, a substrate conveyance system and a solar cell manufacturing method capable of suppressing scratches on a substrate material and performing positioning of the substrate material easily and speedily. <P>SOLUTION: A substrate position adjusting method includes: a first moving step for moving a substrate material 11 from conveyance means for conveying the substrate material 11 onto a support rod 13 which is support means for adjusting a position of the substrate material 11; a fluid supplying step for supplying fluid to a surface on the support means side of the substrate material 11 from the support means and floating the substrate material 11 from the support means by the pressure of the fluid; a position adjusting step for adjusting the position of the substrate material 11 in a floating state in a horizontal direction; a dropping step for, after stopping the supply of the fluid, dropping and placing the substrate material 11 which went through the position adjusting step to the support means; and a second moving step for moving the substrate material 11 from the support means to the conveyance means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
