发明名称 interconnection wiring method, and package type solenoid using this
摘要 PURPOSE: An interconnection wiring method and a mounted solenoid manufacturing method using the same are provided to reduce production costs by omitting a chemical mechanical polishing process and simplifying a manufacturing process. CONSTITUTION: A plurality of via holes(15) is formed in a substrate(10) into a matrix type. An insulating layer(20) is formed in the substrate in which the via hole is formed. A metallic thin film(30) is formed in the via hole using patterning. A mask pattern is formed in a domain except for the via hole using a photograph process. The metallic thin film is evaporated on the substrate which is pattern. The mask pattern is etched. A solder ball(40) is located on the upper side of the via hole. The solder ball is filled in the via hole by heating.
申请公布号 KR101228594(B1) 申请公布日期 2013.01.31
申请号 KR20100057276 申请日期 2010.06.16
申请人 发明人
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
代理机构 代理人
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