STAGE APPARATUS AND OBSERVATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve operability and positioning accuracy when an observer moves a sample by suppressing periodic fluctuation in speed of a piezo stage in a stage apparatus including the piezo stage in which a movable table for placing an observation sample is driven by a walking type piezo motor, and a stage control device for controlling the moving of the piezo stage.

SOLUTION: A stage apparatus 3 includes: a command voltage standard data 304 for driving a walking type piezo motor 102 of a piezo stage 1; a command voltage output timing correction data 305 that is previously measured so as to provide a constant speed to the output of the walking type piezo motor 102; and a command voltage generation unit 302 that generates a command voltage for driving the walking type piezo motor 102 from at least the command voltage standard data 304 and the command voltage output timing correction data 305.

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