| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond film which has high physical properties that diamond originally has, and a method of manufacturing the same. <P>SOLUTION: There is provided the diamond film having a thermal resistance of 1.0×10<SP POS="POST">-8</SP>(m<SP POS="POST">2</SP>K/W) or less. The method of manufacturing the same includes: (1) preparing nanodiamond particles having a primary particle size of 1-20 nm; (2) sticking the nanodiamond particles on a base material; (3) carrying out heat treatment or plasma treatment on the base material with the stuck nanodiamond particles; and (4) forming a diamond film by growing the nanodiamond particles of the treated base material with the stuck nanodiamond particles by a CVD method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
