| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic (US) element 20 in which characteristics are stabilized. <P>SOLUTION: An ultrasonic (US) element 20 comprises a silicon substrate 11, wherein the following layers are laminated on the silicon substrate 11 in the following order: a lower electrode layer 12 having a plurality of lower electrode parts 12A and a plurality of lower wiring parts 12B and connected to a lower electrode terminal 52 to which a drive signal and a bias signal are applied; a lower insulating layer 13; an upper insulating layer 15 on which a plurality of cavities 14 are formed; an upper electrode layer 16 having a plurality of upper electrode parts 16A and a plurality of upper wiring parts 16B, and connected to an upper electrode terminal 51 of ground potential for detecting a capacity signal; and a protection layer 17. The US element further comprises a shielding electrode part 71 formed at least on top of the lower wiring parts 12B and connected to a shielding electrode terminal 53 of the ground potential. <P>COPYRIGHT: (C)2013,JPO&INPIT |
