SURFACE TREATING AGENT FOR POLISHING PAD, AND POLISHING PAD MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface treating agent for a polishing pad, along with a polishing pad manufacturing device, capable of thinly and uniformly forming a film comprising an ultraviolet curing resin on the surface of a polishing pad without replacing work of the polishing pad.

SOLUTION: The polishing pad manufacturing device 10 includes: a surface treating agent coating unit 13 for uniformly coating the surface treating agent 3 for the polishing pad comprising a dispersion liquid obtained by dispersing the ultraviolet curing resin in a solvent on a base material 4 that is installed on a rotatable surface plate 12; and an ultraviolet irradiation unit 14 for uniformly applying an ultraviolet to the surface treating agent 3 for the polishing pad on the coated base material 4.

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