| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for stably manufacturing a recording head that is excellent in refilling properties of a liquid to be ejected, which can form a flow channel so as to have a desired height. <P>SOLUTION: The method for manufacturing the recording head includes: a step of forming a flow-channel side wall forming layer which contains a photosensitive resin, on a substrate 1 having ejection energy generating elements and wiring thereon; a step of exposing the flow-channel side wall forming layer to light, and optically determining a flow channel; a step of forming a shape stabilizing layer 7 which contains the photosensitive resin on the flow-channel side wall forming layer; a step of forming an ejection orifice forming layer 14 which contains a photopolymerization initiator and a negative photosensitive resin on the shape stabilizing layer; a step of exposing the ejection orifice forming layer to light, and optically determining an ejection orifice; and a step of developing the ejection orifice forming layer, shape stabilizing layer, and flow-channel side wall forming layer, in the order named. The photosensitive resin in the shape stabilizing layer is a material to be cured by a component that is produced upon the exposure of the ejection orifice to light forming layer and derives from the photopolymerization initiator. <P>COPYRIGHT: (C)2013,JPO&INPIT |
