| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cassette-in-process conveyance control system which allows for cassette conveyance without lowering the production efficiency of a processing line. <P>SOLUTION: The cassette-in-process conveyance control system of a cassette housing a substrate-in-process from a substrate recovery unit in a processing line of a glass substrate comprises a stocker facility management system which manages a stocker facility for stocking the glass substrate housed in a cassette temporarily, and a process management system which instructs cassette conveyance based on the preset priority information of the cassette conveyance, the cassette conveyance information for the target time in the cassette conveyance in the past, and the factor information having impact on the cassette conveyance in the processing line of the glass substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
