| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon drift diode detector for use in a charged particle apparatus available even for high count rate measurement. <P>SOLUTION: A detector comprises: a SDD 200; an amplifier 206; and a feedback element in a form of, for example, a resistor 208 or a diode, switchably connected to the output of the amplifier 206. When the feedback element is selected via a switch 209, the detector 206 operates in a current measurement mode for determining electron current. When the feedback element is not selected, the detector 206 operates in a pulse height measurement mode for determining the energy of X-ray quanta. <P>COPYRIGHT: (C)2013,JPO&INPIT |
