| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device which can detect a luminance change due to a defect existing in a specimen while separating the luminance change from various noises. <P>SOLUTION: In the present invention, a plurality of scan spots aligned in a main scanning direction are formed on a specimen surface, and the same region of the specimen surface is sequentially scanned at a specified time interval by the n number of scan spots aligned in the main scan direction. A reflected beam from each of the n number of scan spots is received by a photo-detector. A signal processor determines that there is a defect on the specimen when luminance changes exist which exceed a specified threshold value and mutually correspond positionally and temporally among the luminance signals output from the n number of photo-detectors. According to this invention, the luminous change due to the defect formed on the specimen surface is detected by being separated from a luminous source noise and a thermal noise of the photo-detector, and it is possible to set a detection sensitivity of the defect high without increasing a pseudo defect. <P>COPYRIGHT: (C)2013,JPO&INPIT |
