TEMPERATURE CONTROLLER AND TEMPERATURE CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a temperature controller and a temperature control method capable of performing the cooling for a long period of time and reducing a used amount of liquid nitrogen.

SOLUTION: A temperature control unit 2 (a temperature controller) controls a temperature of a vacuum device 100 including: a vacuum vessel 1 capable of sealing a sample 10 and reducing a pressure; a heat exchanger 5 capable of cooling by feeding liquid nitrogen 4 (a cooling medium); a Peltier module 6 capable of heating/cooling the sample 10; and a heater 7 capable of heating the sample 10. The temperature control unit includes: a Peltier module control circuit; a heater control circuit; a temperature setting part for setting a target temperature of the sample 10; a cooling/heating selecting part for selecting the cooling or the heating of the sample 10; and an arithmetic part capable of rewriting the setting of the temperature control. The temperature control unit can switch the cooling from the cooling by the cooling medium to the cooling by the Peltier module 6.

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