发明名称 |
SLOPED STRUCTURE, METHOD FOR MANUFACTURING SLOPED STRUCTURE, AND SPECTRUM SENSOR |
摘要 |
A method for manufacturing a sloped structure is disclosed. The method includes the steps of: (a) forming a sacrificial film above a substrate; (b) forming a first film above the sacrificial film; (c) forming a second film having a first portion connected to the substrate, a second portion connected to the first film, and a third portion positioned between the first portion and the second portion; (d) removing the sacrificial film; and (e) bending the third portion of the second film after the step (d), thereby sloping the first film with respect to the substrate. |
申请公布号 |
US2013026590(A1) |
申请公布日期 |
2013.01.31 |
申请号 |
US201213541311 |
申请日期 |
2012.07.03 |
申请人 |
SEIKO EPSON CORPORATION;YOSHIZAWA TAKAHIKO |
发明人 |
YOSHIZAWA TAKAHIKO |
分类号 |
H01L29/06;H01L21/306;H01L31/0232 |
主分类号 |
H01L29/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|