SUBSTRATE PRODUCTION DEVICE

摘要

A substrate is held on a coating stage. A nozzle unit faces the substrate held on the coating stage, and discharges liquid droplets of a thin-film material toward the substrate from a plurality of nozzle holes. The thin-film material is stored in a reservoir tank. A supply system retrieves the thin-film material from the reservoir tank and supplies the same to the nozzle unit. A first heat source heats the reservoir tank. A first temperature sensor measures the temperature of the reservoir tank. A second heat source heats one or more sections of the supply system. A second temperature sensor measures the temperature of the one or more sections of the supply system. On the basis of the measurement results from the first temperature sensor and the second temperature sensor, a temperature control device controls the first heat source and the second heat source in a manner such that the temperature of the thin-film material in the reservoir tank and the temperature of the thin-film material flowing through the supply system fall within a target temperature range.