METHOD AND APPARATUS FOR PROTECTING PASSIVE COMPONENTS CONNECTED TO A RADIO-FREQUENCY GENERATOR

摘要

A method for protecting passive components (14, 53, 54) connected to a radio-frequency generator (11, 11.1, 51, 52) comprises the method steps of: a. producing a radio-frequency power at a fundamental frequency by means of the radio-frequency generator (11, 11.1, 51, 52); b. transmitting the radio-frequency power to a load (16) via a radio-frequency cable (14, 53, 54); c. determining a variable related to the radio-frequency load on at least one passive component connected to the RF generator, in particular the radio-frequency cable (14, 53, 54); d. comparing the determined variable with a reference variable which describes the maximum load on at least one connected passive component; e. adapting the radio-frequency power produced by the radio-frequency generator (11, 11.1, 51, 52) at the fundamental frequency on the basis of the comparison result.