THERMOELECTRIC CONVERSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a thermoelectric conversion element with improved utility as an element module which has an enhanced performance index by utilizing a Fe2VAl based alloy thin film under conditions where its thermal conductivity is lowered.

SOLUTION: The thermoelectric conversion element has a structure where a unit structure consisting of a thermoelectric conversion material layer 202 and a conductive buffer layer 203 is stacked repeatedly multiple times over a buffer layer 201 formed on a substrate 200. Each of the thermoelectric conversion material layers comprises a Full-Heusler alloy or a Full-Heusler alloy thin film having a thickness of 1-200 nm.

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