摘要 |
IN AN ION GENERATION APPARATUS, AN INDUCTION ELECTRODE (2) FOR GENERATING POSITIVE IONS AND AN INDUCTION ELECTRODE (3) FOR GENERATING NEGATIVE IONS ARE EACH FORMED AS AN INDEPENDENT PART AND SEPARATELY MOUNTED ON A SUBSTRATE (1).THEREFORE, EVEN IF THE SUBSTRATE (1) IS WARPED WITH CHANGES IN TEMPERATURE, TIP END PORTIONS OF NEEDLE ELECTRODES (4,5) CAN BE POSITIONED AT THE CENTERS OF THROUGH HOLES (11) IN THE INDUCTION ELECTRODES (2,3), RESPECTIVELY, AND POSITIVE IONS AND NEGATIVE IONS CAN BE STABLY GENERATED. |