| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic element 20 in which characteristics are stabilized. <P>SOLUTION: An ultrasonic element 20 comprises: a silicon substrate 11; a lower electrode layer 12 having a plurality of lower electrode parts 12A and a plurality of lower wiring parts 12B and connected to a lower electrode terminal 52 to which a drive signal and a bias signal are applied; a lower insulating layer 13; an upper insulating layer 15 on which a plurality of cavities 14 which are smaller than the lower electrode parts 12A are formed; an upper electrode layer 16 which has a plurality of upper wiring parts 16B and a plurality of upper electrode parts 16A disposed facing the lower electrode parts 12A via the cavities 14, respectively, and smaller than the lower electrode parts 12A but larger than the cavities 14, and which is connected to an upper electrode terminal 51 of ground potential for detecting a capacity signal; and a protection layer 17. <P>COPYRIGHT: (C)2013,JPO&INPIT |
