| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately detect a work alignment mark (work mark) even when appearance thereof varies. <P>SOLUTION: An operator sets illumination means 10c, which is dark-field illumination means, at a height where a work mark is clearly visible, takes an image of a work mark WAM on a work-piece W with an alignment microscope 10, and registers the work mark WAM as a registered pattern in a memory unit 11b of a controller 11. When the work mark is detected, an alignment mark detection unit 11c of the controller 11 searches the work-piece W with the alignment microscope 10 while changing the height of the illumination means 10c with illumination-means moving means 5, and obtains a degree of matching by comparing a pattern on the work-piece W and the registered pattern. When a pattern with a high matching degree is detected, the alignment mark detection unit 11c detects this pattern as the work mark. An alignment control unit 11e aligns a mask M and the work-piece W by using this work mark. <P>COPYRIGHT: (C)2013,JPO&INPIT |
