| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate sorting device which rapidly and reliably conveys a substrate and which facilitates the recovery of the substrate in a storage stocker, because the substrate sorting device for housing the substrate in the storage stocker by tilting a tilting conveyer obliquely downward to move the substrate downward is sometimes brought into a state in which the storage leans against a sidewall of the storage stocker and requires a means for recovering the substrate in the storage stocker. <P>SOLUTION: This device for sorting the substrate 31 includes the tilting conveyer 12', and the storage stocker 21 comprising an independent downslope part 211 and an independent storage part 212. The tilting conveyer 12' is tilted obliquely downward, and the substrate 31 is slid down into the storage part 212 through the downslope part 211. The device for sorting the substrate 31 is characterized in that the tilting conveyer 12' and the storage stocker 21 are disposed so that a leading end of the substrate 31 cannot abut on the downslope part 211 of the storage stocker 21 when the substrate 31 is partially placed on the tilting conveyer 12'. <P>COPYRIGHT: (C)2013,JPO&INPIT |
