发明名称 Nonvolatile Memory Device and Method for Fabricating the Same
摘要 Provided are a nonvolatile memory device and a method for fabricating the same. The method includes sequentially stacking on a semiconductor substrate a first interlayer dielectric film, a first sacrificial layer, a second interlayer dielectric film, and a second sacrificial layer, forming a resistance variable layer and a first electrode penetrating the first and second interlayer dielectric films and the first and second sacrificial layers, forming an upper trench by removing a top portion of the first electrode, filling the upper trench with a channel layer, exposing a portion of a side surface of the resistance variable layer by removing the second sacrificial layer, forming an insulation layer within the channel layer, and forming a second electrode on the exposed resistance variable layer.
申请公布号 US2013029468(A1) 申请公布日期 2013.01.31
申请号 US201213537588 申请日期 2012.06.29
申请人 SAMSUNG ELECTRONICS CO., LTD.;PARK CHAN-JIN 发明人 PARK CHAN-JIN
分类号 H01L21/02 主分类号 H01L21/02
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