发明名称 |
POLISHING APPARATUS, POLISHING PAD, AND POLISHING INFORMATION MANAGEMENT SYSTEM |
摘要 |
A polishing pad has structural parts embedded therein; sensors, a memory for storing detected information obtained by the sensors, and a communication unit driven by a power supply unit to communicate with outside in a non-contact manner. The polishing pad and a communication unit configured to communicate with the communication unit of the polishing pad in a non-contact manner constitute a polishing information management system. The polishing pad and a communication unit configured to transmit and receive the information to and from the communication unit of the polishing pad in a non-contact manner constitute a polishing apparatus. |
申请公布号 |
KR20130012013(A) |
申请公布日期 |
2013.01.30 |
申请号 |
KR20127024348 |
申请日期 |
2011.03.09 |
申请人 |
NITTA HAAS INCORPORATED |
发明人 |
PARK, JAE HONG |
分类号 |
B24B37/00;B24B37/20;B24B49/10;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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