| 摘要 |
PURPOSE: An apparatus for treating substrate is provided to reduce a use amount of chemical liquid, to reduce operation cost, and to have simply supplying structure of liquid chemical. CONSTITUTION: An apparatus for treating substrate comprises a plurality of transferring roller(200), and a plurality of liquid chemical supply tanks(20). The plurality of transferring rollers rotates to transfer a substrate and wet the bottom of the substrate with the liquid chemical. Each of the liquid chemical supply tanks are arrange in the lower part of the each transferring roller and is spaced to each other. The transferring roller comprises a roller body(230) and a rotary shaft. The roller body accepts the lower side of a substrate and the liquid chemical supplier. The rotary shaft has a first rotary shaft part and a second rotary shaft part.
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